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    • i-Stock Semi Foup stocker

    The Front Opening Unified Pod (FOUP) is a wafer storage vehicle commonly used by semiconductor manufacturers to transport it from one manufacturing station to another. Semiconductor foup intelligent storage is to store and manage FOUP through efficient and intelligent storage devices, and realize the accurate control of FOUP's temperature, humidity, cleanliness and other environmental parameters through the introduction of a new generation of information technology such as the Internet of Things, big data and cloud computing, while improving transportation efficiency and accuracy, reducing the error rate and loss in business processes.
    technical parameter

    item

    argument

    Storage type

    i-Stock Semi Foup stocker

    External dimension

    L5100*W2400*H2700(customizable)

    Material type

    FOUP、FOSB、SMIF Pod、Mask、Cassette、Wafer Stack Box

    wafer specification

    6 "/8" /12"

    Storage capacity

    320 boxes (6 "Wafer Stack Box)

    Arm load

    12-25kg (customizable)

    Positioning accuracy

    0.3-0.5mm

    Save/take time

    20~30s/ box

    Purification class

    class10；100；1000

    Vibration

    ≤0.5G

    noise

    ≤75DB

    UPS

    After power off half an hour for the industrial computer to upload information, the operating system shut down normally

    Communication mode

    SECS/GEM (E82/E88)

    Electrostatic protection

    Anti-static treatment material storage, surface resistance value106-1011Ω
    The external structure of the device is grounded. The power supply of the device is grounded
    < 1Ω

    Temperature and humidity control range

    Control range: Temperature 20-25°C, relative humidity 10-45%RH
    Support ammonia filling

    EFEM

    It can connect to AMR/OHT

    Product advantages

    • High intelligence

      One thing, one yard, one storage place "to achieve unmanned,
      Accurate and intelligent management

    • High efficiency

      Two manipulators working together,
      Higher efficiency in and out of storage picking, automatic batch material access

    • High precision

      Improve material picking accuracy and accuracy,
      Reduce labor intensity and artificial wafer loss

    • cleanliness

      Equipped with FFU, it meets the requirements of semiconductor workshop cleanliness level

    • multi-mode

      A variety of inbound and outbound docking modes,
      Calmly cope with the transportation needs of different materials in various scenarios

    • visualization

      Customized intelligent Kanban, intelligent data visible

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