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  • i-Stock Semi Wafer stocker

    i-Stock Semi Wafer stocker breaks through technical barriers to create industry wafer storage devices, which are accurately controlled by single wafer, and are equipped with clean robotic arms to meet the dust-free level requirements of the semiconductor industry. High-speed transfer of wafers in the library, accurate take-up of wafers, outside the library can be expanded to AMR loading and unloading, convenient and efficient, to create intelligent and visual semiconductor wafer storage devices.
    technical parameter

    item

    argument

    Storage type

    i-Stock Semi Wafer stocker

    External dimension

    L4465*W2200*H2500 (customizable)

    Material type

    wafer

    wafer specification

    4/6/8/12 inch

    Storage capacity

    1800 pieces (6 "wafer)

    Arm load

    1kg

    Positioning accuracy

    ¡À0.1mm

    Save/take time

    6-12s/pcs

    Purification class

    class10£»100£»1000

    Vibration

    ¡Ü0.5G

    noise

    ¡Ü75DB

    UPS

    After power off half an hour for the industrial computer to upload information, the operating system shut down normally

    Communication mode

    SECS/GEM (E82/E88)

    Electrostatic protection

    Anti-static treatment material storage, surface resistance value106-1011¦¸
    The external structure of the device is grounded. The power supply of the device is grounded < 1¦¸

    Temperature and humidity
    Scope of control

    Control range: Temperature 20-25¡ãC, relative humidity 10-45%RH
    Nitrogen can be added

    EFEM

    It can connect to AMR/OHT


    Product advantages

    • High intelligence

      One thing, one code, one storage location "to achieve unmanned, accurate,
      Intelligent management

    • High efficiency

      Double manipulator cooperative operation, higher efficiency in and out of the warehouse picking,
      Automatic bulk material access

    • High precision

      Improve material picking accuracy and accuracy,
      Reduce labor intensity and artificial wafer loss

    • cleanliness

      Equipped with FFU, it meets the requirements of semiconductor workshop cleanliness level

    • multi-mode

      A variety of inbound and outbound docking modes,
      Calmly cope with the transportation needs of different materials in various scenarios

    • visualization

      Customized intelligent Kanban, intelligent data visible

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