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  • Cooperative robot

    Cooperative robot is an intelligent robotic system for semiconductor manufacturing, mainly used for wafer box access and handling tasks. Equipped with a full range of sensors and vision systems, these robotic devices can accurately sense the location of the wafer box, achieve accurate handling, and through seamless docking with the warehouse management system, achieve automated and information management of the wafer box access task. Cooperative robot increases productivity, reduces costs, improves safety, and drives intelligence and automation in wafer warehouse management. Its flexible adaptability and intelligent management characteristics make it an indispensable and important equipment in the semiconductor manufacturing process, providing strong support for the production efficiency and quality of the factory.
    technical parameter

    item

    argument

    External dimension

    Length 1200mm* Width 500mm* height 800mm

    Guidance mode

    Laser guidance

    Equipment weight

    450kg (up to 600kg)

    Walking mode

    Large universal wheel, can access the cargo elevator

    Driving mode

    The vision system automatically lifts cargo in alignment

    Angle of climb

    Up and down slope (8 degrees)

    Navigation accuracy

    ¡À10mm

    Communication mode

    Supports E84/WIFI communication

    Charging mode

    The charging pile charges automatically

    Safe sensing range

    0-3M adjustable/emergency braking distance less than 20mm

    Safety protection

    Built-in intelligent vision system, sound and light alarm with obstruction detection sensor and mechanical anti-collision mechanism double protection

    Product advantages

    • Improve production efficiency

      Semiconductor silo cobots automate wafer access tasks, reducing manual operation time and increasing production efficiency.

    • Precise handling

      Semiconductor silo cobots equipped with sensors and vision systems can accurately sense wafer position for accurate handling and reduce the risk of damage.

    • Intelligent management

      The semiconductor silo cooperative robot can be seamlessly connected with the warehouse management system to realize the automation and information management of wafer access tasks.

    • Flexible adaptation

      Using control algorithms and path planning techniques, semiconductor silo cobots can flexibly adapt to different production environments and task requirements.

    • Reduce cost

      By automating wafer access tasks, semiconductor silo cobots can reduce labor costs and increase production efficiency, thereby reducing production costs.

    • Security and stability

      Semiconductor silo cobots are equipped with multiple safety protection systems to ensure the safety of wafers and equipment during handling and improve the stability of the production process.

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