|
ÏîÄ¿ |
²ÎÊý |
|
É豸ÐͺŠ|
e-Rack |
|
ÍâÐͳߴç |
L1100*W900*H1200mm |
|
ÎïÁÏÖÖÀà |
Foup/Cassette/MaskµÈ°ëµ¼ÌåÎïÁÏ |
|
FOUP¹æ¸ñ |
L440mm*W350mm*H340mm |
|
´¢´æÈÝÁ¿ |
8¸öFOUP/Cassette |
|
ÖÇÄÜ¿´°å |
´¥¿ØÆÁ |
|
ͨѶ·½Ê½ |
SECS/GEM (E84) |
|
ʹÓû·¾³ |
ÖÜΧÎÂ¶È 20~25¡æ |
|
µçÔ´ |
ÖÜΧʪ¶È 35~85% |
|
ÒÆ¶¯µçÔ´ |
|
|
RFID¹æ¸ñ |
·¢ÐÅÆµÂÊ134.2KHz£¬¸ÐÓ¦¾àÀëR80mm |
|
¾²µç·À»¤ |
1.·À¾²µç´¦Àí²ÄÖÊ´¢Î»£¬±íÃæ×èÖµ106-1011¦¸ |
¿É´¥ÆÁ¼ìË÷ÏÔʾÆÁ£¬
¼¯ÖÐչʾ¸Ã»õ¼Üµ±Ç°¸÷´¢Î»×´Ì¬
È«³ÌÖÇÄÜ»¯¹ÜÀí£¬ËæÊ±¼à²â»õÎï×´¿ö
»õ¼Ü·ÖΪÁ½ÖÖÐÎʽ£¬¹Ì¶¨»õ¼ÜÓëÒÆ¶¯»õ¼Ü£¬
¿Í»§¿É¸ù¾Ý×ÔÉíÐèÇóÑ¡Ôñ